23

Etching of porous SiOCH materials in fluorocarbon-based plasmas

Year:
2004
Language:
english
File:
PDF, 838 KB
english, 2004
34

Ion Energy Distribution in a Radiofrequency C4F8

Year:
2001
Language:
english
File:
PDF, 145 KB
english, 2001
48

Plasma diagnostic of an RF magnetron Ar/N2 discharge

Year:
2002
Language:
english
File:
PDF, 382 KB
english, 2002